Canon develops nano imprint technology for manufacturing 11nm chips




Canon has confirmed that the semiconductor equipment can make to 11nm by using nano-imprint lithography. It was able to report the group at Canon Expo 2015 in Tokyo. Canon showed a mold or form that serves as a model and made the wafer at the expo.

It writes the Nikkei Techology on his site. Canon is investigating the nano imprint technology with Toshiba to further decrease the minimum size of transistors and other components on chips. The technique is known internationally as nano-imprint lithography or NIL. Since there is no need to use is made by lithography to the structures to be applied to the wafers, the line width of the wafers is not determined by the wavelength of the light.

At present, Canon is testing nano-stamping machines to make chips with a 16 to 20nm-process commercially viable. The first machines should reach the market in 2016, and chips with the 16-20nm size are likely to be available in 2017. Canon has been working on the further development of the technology. Early this year, announced the company has been that it is still more would have engaged in the production of equipment for nano-imprint lithography.

Nano stamp lithography operates by means of a die which comes into contact with a material which on glass transition temperature is brought with the aid of UV-light or laser onto the surface of a substrate. After the ‘stamping’ of the negative form in the temporary softer material, hardens the material, and there is a positive structure. Because there is no precise lens elements are needed, such as in the production of semiconductors by means of lithographic techniques, the construction and the size of the machines simpler to NIL. Through the latter, the disadvantages such as slower processing, less problematic, because the cost per machine is lower.

Initially, the technique will be applied for the making of NAND flash memory and not logic circuits, since relatively easy pollution and dust occurs or collapsed patterns directly make a whole circuit unusable.

Nano-Stamping Machines Canon in development
Nano-Stamping Machines Canon in development


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